July 7, 2011

Rudolph Launches Genesis Enterprise 7.0 Software for Semiconductor Yield Enhancement

Genesis is an offline yield analysis and data mining software with parametric yield management tools designed to maximize factory efficiency and identify causes of yield loss.

Flanders, New Jersey (July 7, 2011)—Rudolph Technologies, Inc. (NASDAQ: RTEC), a leading provider of process characterization equipment and software for semiconductor, solar and LED industries, announced today the release of Genesis® Enterprise version 7.0. Genesis is an offline yield analysis and data mining software with parametric yield management tools designed to maximize factory efficiency and identify causes of yield loss.

“Since Rudolph’s acquisition of the Yield Dynamics software business from MKS Instruments a year ago, we have made significant performance improvements to the product. Each new release has added a greater level of innovation and intellectual property that will, in turn, benefit our customers,” said Mike Plisinski, Vice President and General Manager of Rudolph’s Data Analysis & Review Business Unit. “Version 7.0 being released today is a result of a successful integration of the YDI team into the Rudolph organization combined with our 20+ years in yield management software.”

Genesis 7.0 is much faster and offers greater functionality.  Specific enhancements building on the Genesis patented technology include more robust genealogy, more efficient charting and analysis, easier data management and more intuitive wafer/sheet mapping and bin maps.

“Rudolph quickly assumed responsibility and ownership of this product in the field,” said Gottfried Fraiss, Director Product & Test Engineering at SensorDynamics AG. “The timeliness and quality of new Genesis releases has been appreciated, and the level of dedication gives us that extra measure of assurance we need to keep our operations running smoothly on a day to day basis.”

The Genesis Enterprise platform includes data acquisition and integration, data analysis, automated decision making through data mining and a development environment through work flow and scripting. Specialized analysis algorithms identify domain-specific issues, such as spatial anomalies, wafer processing sequence problems, commonality of effects, and systematic and random yield loss. Genesis software seamlessly handles data from any source: parametric, defect, memory, design, or assembly and packaging, and easily integrates all-surface defect analysis, fault detection, and run to run process control to help users achieve maximum efficiency. Genesis now supports Oracle® 11g and Windows® (32bit and 64bit).

SensorDynamics is a semi-fabless semiconductor company that focuses on innovative sensor solutions for  high volume applications in automotive, industry and high-end consumer sectors. SensorDynamics develops and supplies fail-safe micro and wireless semiconductor products for automotive, industry and high-end consumer key accounts and is certified under ISO/TS 16949. The company acts as a general contractor with in-house MEMS production and cooperates closely with leading international technology partners.

With its headquarters in Lebring near Graz, Austria, SensorDynamics has subsidiaries in Italy and Germany and a world-wide sales network. For more information on SensorDynamics and its products, go to

Rudolph Technologies, Inc. is a worldwide leader in the design, development, manufacture and support of defect inspection, process control metrology, and data analysis systems and software used by semiconductor device manufacturers worldwide. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down the costs and time to market of their products. The company’s yield management solutions are used in both the wafer processing and final manufacturing of ICs, as well as in emerging markets such as LED and Solar. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the company’s web site at

Safe Harbor Statement
This press release contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995 (the “Act”) which include the benefits to customers of Rudolph’s products, Rudolph’s existing market position and its ability to maintain and advance such position relative to its competitors and Rudolph’s ability to meet the expectations and needs of our customers as well as other matters that are not purely historical data. Rudolph wishes to take advantage of the “safe harbor” provided for by the Act and cautions that actual results may differ materially from those projected as a result of various factors, including risks and uncertainties, many of which are beyond Rudolph’s control. Such factors include, but are not limited to, delays in shipping products for technical performance, component supply or other reasons, the company’s ability to leverage its resources to improve its positions in its core markets and fluctuations in customer capital spending. Additional information and considerations regarding the risks faced by Rudolph are available in Rudolph’s Form 10-K report for the year ended December 31, 2010 and other filings with the Securities and Exchange Commission.  As the forward-looking statements are based on Rudolph’s current expectations, the company cannot guarantee any related future results, levels of activity, performance or achievements. Rudolph does not assume any obligation to update the forward-looking information contained in this press release.

For more information, please contact:

Steven R. Roth

Trade Press
Virginia Becker