August 11, 2010

Rudolph Technologies Acquires Selected Assets Related to MKS Instruments’ Yield Dynamics Software Business

Products and R&D Capability Complement Rudolph’s Expanding Presence in Semiconductor Process Control

Flanders, New Jersey (August 11, 2010)—Rudolph Technologies, Inc. (NASDAQ: RTEC), a leading provider of process characterization equipment and software for wafer fabs and advanced packaging facilities, reported today it has acquired selected assets of the Yield Dynamics software business from MKS Instruments (NASDAQ: MKSI-News). The purchase includes selected assets and intellectual property (IP) related to MKS yield management software used by semiconductor manufacturers and fabless semiconductor suppliers. In addition to acquiring the software assets, approximately 35 engineering and applications personnel, most of whom are based in Tianjin, China, will join Rudolph’s Data Analysis and Review Business Unit.

“The products and technology include patented analytical techniques for yield improvement that are complementary to our existing yield management and process control portfolio,” stated Mike Plisinski, Rudolph’s vice president and general manager, Data Analysis and Review Business Unit. “In addition to the technology, we welcome the China personnel to our growing applications and product development team.”

As processes become more challenging, manufacturers are becoming more dependent on data management systems to deliver fast and accurate process information analysis designed to automate decision-making and optimize yield. The Yield Dynamics package includes Genesis® Enterprise software, a fabwide yield management solution that combines parametric and yield optimization in a unified platform with data mining and workflow development across all data sources.

Terms of the cash transaction are undisclosed. Rudolph does not expect the transaction to have any material impact on its operations for the remainder of the year or an impact on any previous financial guidance provided by the company.

Rudolph Technologies, Inc. is a worldwide leader in the design, development, manufacture and support of defect inspection, process control metrology, and data analysis systems used by semiconductor device manufacturers worldwide. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down costs and time to market. Rudolph offers yield management solutions used in wafer processing and final manufacturing through a family of systems for macro-defect inspection (detection and classification), as well as transparent and opaque thin film measurements.

The company has enhanced the competitiveness of its products in the marketplace by anticipating and addressing many emerging trends driving the semiconductor industry's growth. Rudolph’s strategy for continued technological and market leadership includes aggressive research and development of complementary inspection and metrology solutions. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the company’s web site at

MKS Instruments, Inc. is a leading, global provider of technologies to power, control, deliver, monitor, measure and analyze advanced processes in high growth applications. Our primary served markets are manufacturers of capital equipment for thin film applications including semiconductor devices, flat panel displays, light emitting diodes (LEDs), solar cells, data storage media and coatings, as well as medical equipment; energy generation and environmental monitoring processes; biopharm and other industrial manufacturing; and university, government and industrial research laboratories.

Safe Harbor Statement
This press release contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995 (the “Act”) which include demand for Rudolph’s products, Rudolph’s existing market position and its ability to maintain and advance such position relative to its competitors and Rudolph’s expectations about our future bookings and backlog as well as other matters that are not purely historical data. Rudolph wishes to take advantage of the “safe harbor” provided for by the Act and cautions that actual results may differ materially from those projected as a result of various factors, including risks and uncertainties, many of which are beyond Rudolph’s control. Such factors include, but are not limited to, delays in shipping products for technical performance, component supply or other reasons, the company’s ability to leverage its resources to improve its positions in its core markets and fluctuations in customer capital spending. Additional information and considerations regarding the risks faced by Rudolph are available in Rudolph’s Form 10-K report for the year ended December 31, 2009 and other filings with the Securities and Exchange Commission.  As the forward-looking statements are based on Rudolph’s current expectations, the company cannot guarantee any related future results, levels of activity, performance or achievements. Rudolph does not assume any obligation to update the forward-looking information contained in this press release.


Steven R. Roth

Trade Press:
Virginia Becker